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Model Number |
IHP-1000 |
Application
- NANO/Micro imprint lithography
- Micro contact printing
- Ink jet printing (LCD, OLED, LED, solar cell)
- MEMS device(μ-Machines)
- Optics(μ-mirrors), Lens
- Self Cleaning-image sensors
- Bio/DNA chip
- Hot embossing
- Bio medical layer
- Transparent Film
- Moisture resistance
- Barrier film - chemical resistance
Specification
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Plasma Type
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Atmospheric Glow Plasma
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Size/Weight
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920(W) x 750(L) x 1250(H) / 150kg
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Plasma Length
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200mm
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Treatment Speed
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1-100mm/s Under
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Process Gas
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Ar, He
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Reaction Gas
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N2, O2, H2, Hydrophobic Mixture Gas, etc.
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RF Power
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13.56MHz 300W
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Power
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AC220V, 60Hz, 1phase
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Cooling Type
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Air Cooling
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Contact angle vs Number of treatments

Thickness of hydrophobic coating layer

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